Features of electron beam micro-dimensional processing of substrates

Features of electron-beam micro-scale processing of substrates made from various types of ceramics 

Y. Cho, V. Maslovsky, K. Moiseev, I. Vorobiev, M. Nazarenko

Journal. Electronics: Science, Technology, Business, No. 3, 2023

https://www.electronics.ru/journal/article/9833

Introduction

Outstanding mechanical and physical properties such as high thermal resistance, hardness, and chemical stability have contributed to the application of ceramics in many fields. In the electrical and radio-electronic industry, ceramic materials are often used as substrates for electronic devices or modules, including RF and microwave applications.

However, the high fragility and hardness of ceramics make their processing challenging using traditional methods, and surface damage during processing affects the quality of the resulting products. In many cases, due to the increasingly stringent requirements for electronic devices and their miniaturization, such damages become critical for the functioning of the final products.

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