Ceramic substrates made of aluminum oxide Al2O3 are the basis for the creation of hybrid integrated circuits, ceramic capacitors, resistors, heaters, various semiconductor elements and electrical products.
The raw material for the production of vacuum-tight ceramics Al2O3 is corundum, so ceramics are often called not only "aluminum oxide", but also corundum ceramics. Vacuum-tight corundum ceramics are resistant to various acids and other aggressive media, and are an excellent durable insulator. Substrates made of Al2O3 do not lose their performance in case of sudden temperature changes.
An important role is played by the percentage of aluminum oxide in the total volume and its crystal lattice. They determine its future performance characteristics, such as thermal conductivity, hardness, bending strength, coefficient of specific expansion and others.
Properties |
Materials |
|||
Al2O3 94,4% (ВК-94ДН) |
Al2O3 96,0% (ВК-96ДН) |
Al2O3 99,6% (ВК-100ДН) |
||
Colour |
pink |
white |
white |
|
Bulk density |
г/см3 |
3,60 |
3,70 |
3,90 |
Surface roughness, Ra
(grinding) |
мкм |
- |
0,2-0,7 |
0,1 |
Surface roughness Ra (polished) |
мкм |
- |
≤ 0,03 |
≤ 0,05 |
Mechanical properties |
||||
Flexural strength |
МПа |
280 |
350 |
500 |
Compressive strength |
МПа |
|
|
450 |
Elastic modulus |
ГПа |
- |
330 |
330 |
Vickers hardness |
ГПа |
- |
14 |
16 |
Fracture toughness |
|
- |
- |
-
|
Physical properties |
||||
Coefficient of thermal expansion (40-300°C) |
10 -6 /°C |
6,5 - 7,5 |
6,5 ~ 7,5 |
6,2 ~ 7,2 |
Coefficient of thermal expansion (300-800 С) |
|
|
6,5 ~ 8,0 |
6,5 ~ 8,2 |
Thermal conductivity (25°C) |
Вт/м∙°K |
15 - 20 |
≥ 24 |
≥ 30 |
Specific heat capacity |
Дж/Кг∙°К |
- |
750 |
750 |
Dielectric strength |
|
|
≥ 17 |
≥ 15 |
Volumetric resistance(25 С) |
|
|
≥ 1014 |
≥ 1014 |
Dielectric constant (1 МГц) |
- |
9,0 - 10,0 |
9 ~ 10 |
10 |
Dielectric losses (1МГц, 25°C) |
∙10 -4 |
4 |
2 |
2 |
Sizes |
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Distance between scribing lines, мм |
|
|
1±0,05 |
1±0,05 |
Minimum hole diameter, мм |
|
|
0,1±0,05 |
0,1±0,05 |
Thickness, мм |
|
|
0,2 ~ 2,0 |
≤ 0,635 |
Thickness tolerance (min), мм |
|
|
± 0,03 |
± 0,04 |
Dimensions (max), мм |
|
|
139,7 x 190,5 |
120 x 120 |
Dimensional tolerance (min), мм |
|
|
(+0,15 / -0,05) |
±0,1; ±2 |
Metallisation |
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DBC technology |
+ |
+ |
- |
|
Thick-film technology |
+ |
+ |
+ |
|
Thin-film technology |
+ |
+ |
+ |